Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis
| Periodical | Key Engineering Materials (Volumes 434 - 435) |
|---|---|
| Main Theme | High-Performance Ceramics VI |
| Edited by | Wei Pan and Jianghong Gong |
| Pages | 830-833 |
| DOI | 10.4028/www.scientific.net/KEM.434-435.830 |
| Citation | Jae Hwan Pee et al., 2010, Key Engineering Materials, 434-435, 830 |
| Online since | March, 2010 |
| Authors | Jae Hwan Pee, Jong Chul Park, Kwang Taek Hwang, Soo Ryong Kim, Woo Seok Cho |
| Keywords | AlCl3-NH3-N2-H2 System, Aln, Chemical Vapor Synthesis, Nitridation |
| Price | US$ 28,- |
AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.