Paper Title:

Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

Periodical Key Engineering Materials (Volumes 434 - 435)
Main Theme High-Performance Ceramics VI
Edited by Wei Pan and Jianghong Gong
Pages 830-833
DOI 10.4028/www.scientific.net/KEM.434-435.830
Citation Jae Hwan Pee et al., 2010, Key Engineering Materials, 434-435, 830
Online since March, 2010
Authors Jae Hwan Pee, Jong Chul Park, Kwang Taek Hwang, Soo Ryong Kim, Woo Seok Cho
Keywords AlCl3-NH3-N2-H2 System, Aln, Chemical Vapor Synthesis, Nitridation
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Abstract

AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.