Paper Title:
Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures
  Abstract

This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the simulation environment will be outlined.

  Info
Periodical
Edited by
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
Pages
136-140
DOI
10.4028/www.scientific.net/KEM.437.136
Citation
C. Schrader, C. Herbst, R. Tutsch, S. Büttgenbach, T. Krah, "Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures", Key Engineering Materials, Vol. 437, pp. 136-140, 2010
Online since
May 2010
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