Paper Title:
Oil-Filled Isolated High Pressure Sensor for High Temperature Application
  Abstract

In order to solve pressure measurement problems in the fields of aerospace, petroleum and chemical industry, mobile and military industry, a oil-filled isolated piezoresistive high pressure sensor has been developed with the range of 0~100 MPa, and was able to work reliably under high temperature of above 200 °C. Based on MEMS (Micro Electro-Mechanical System) and SIMOX (Separation by Implantation of Oxygen) technology, the piezoresistive sensor chip has been developed. By high temperature packaging process, the oil-filled isolated high pressure sensor was fabricated with the sensor chip and corrugated diaphragm. The experimental results showed that the oil-filled isolated high pressure sensor had good performances under high temperature of 200 °C, such as linearity error of 0.07%FS, repeatability error of 0.04%FS, hysteresis error of 0.03%FS.

  Info
Periodical
Edited by
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
Pages
397-401
DOI
10.4028/www.scientific.net/KEM.437.397
Citation
Z. D. Jiang, L. B. Zhao, Y. L. Zhao, Y. H. Liu, P. D. Prewett, K. Jiang, "Oil-Filled Isolated High Pressure Sensor for High Temperature Application", Key Engineering Materials, Vol. 437, pp. 397-401, 2010
Online since
May 2010
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Price
$32.00
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