Paper Title:
Model-Based Correction of Image Distortion in Scanning Electron Microscopy
  Abstract

A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown.

  Info
Periodical
Edited by
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
Pages
40-44
DOI
10.4028/www.scientific.net/KEM.437.40
Citation
D. Gnieser, C. G. Frase, H. Bosse, R. Tutsch, "Model-Based Correction of Image Distortion in Scanning Electron Microscopy", Key Engineering Materials, Vol. 437, pp. 40-44, 2010
Online since
May 2010
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$32.00
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