Model-Based Correction of Image Distortion in Scanning Electron Microscopy |
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| Journal | Key Engineering Materials (Volume 437) |
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| Volume | Measurement Technology and Intelligent Instruments IX |
| Edited by | Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova |
| Pages | 40-44 |
| DOI | 10.4028/www.scientific.net/KEM.437.40 |
| Citation | Dominic Gnieser et al., 2010, Key Engineering Materials, 437, 40 |
| Online since | May, 2010 |
| Authors | Dominic Gnieser, Carl Georg Frase, Harald Bosse, Rainer Tutsch |
| Keywords | Micro-Metrology, Monte-Carlo Simulation, Nano-Metrology, Scanning Electron Microscope (SEM) |
| Abstract | A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown. |
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