Paper Title:
Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
  Abstract

Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors can be more than 70 nm. They are result of changing effective wavelength within the measurement field. We have proposed the method for error calculation using measurement data and then their correction experimentally up to 10 nm.

  Info
Periodical
Edited by
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
Pages
51-55
DOI
10.4028/www.scientific.net/KEM.437.51
Citation
E. V. Sysoev, "Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations", Key Engineering Materials, Vol. 437, pp. 51-55, 2010
Online since
May 2010
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