Design and Analysis of a 6-DOF Monolithic Nanopositioning Stage |
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| Journal | Key Engineering Materials (Volume 437) |
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| Volume | Measurement Technology and Intelligent Instruments IX |
| Edited by | Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova |
| Pages | 61-65 |
| DOI | 10.4028/www.scientific.net/KEM.437.61 |
| Citation | Ling Li Cheng et al., 2010, Key Engineering Materials, 437, 61 |
| Online since | May, 2010 |
| Authors | Ling Li Cheng, Jian Wei Yu, Xiao Fen Yu |
| Keywords | 6-DOF, Flexure Hinge, Nanopositioning, Piezoelectric Actuator |
| Abstract | A 6-DOF monolithic nanopositioning stage is developed for three coordinate measuring machines (CMM) with nanometer resolution. The stage consists of a monolithic flexure hinge mechanism, six piezoelectric actuators and six fiber-optic displacement sensors. A mathematical model of the constraint optimization problem is presented. Based on the solution of the optimization problem, the final design of the 6-DOF stage is also presented. The numerical analysis on static and dynamic behavior of the stage is done by using the finite element method. The experimental results of the performance of the 6-DOF stage are presented. |
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