Paper Title:
Advantages in the Small-Angle Scattering of X-Ray for Studying Optoelectronic Devices within the Frames of ISTC Projects
  Abstract

The project ISTC “SPECTROMETRIC POSITION SENSITIVE DETECTOR WITH BASE ENERGY SHIFT” is interesting for creation new area semiconductor detector device for EXAFS spectroscopy, for traditional X-ray diffractometry (XRD), as well as Small-Angle X-ray Scattering diffractometry (SASX). Diffractometry methods allow creating original features of position sensitive detector. Crystallography quality of silicon multi layer detector with original photo mask was examined by XRD and SAXS with ordinary scintillation detectors. Grazed incidence SAXS (GISAXS) provides information both about lateral and normal ordering of multilayers at a surface or inside a thin epitaxial film [1]. Using high-energy X-ray source (rotating anode or synchrotron radiation in future) and high adjustment monochromator SAXS rocking curves in transition and reflection mode had been received. It allows obtaining the information of 3D size lamellar or column-like domains. Results of an experimental investigation of the size layer structure are presented.

  Info
Periodical
Edited by
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
Pages
641-645
DOI
10.4028/www.scientific.net/KEM.437.641
Citation
M. E. Boiko, A. M. Boiko, "Advantages in the Small-Angle Scattering of X-Ray for Studying Optoelectronic Devices within the Frames of ISTC Projects", Key Engineering Materials, Vol. 437, pp. 641-645, 2010
Online since
May 2010
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$32.00
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