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Authors: Dominic Gnieser, Carl Georg Frase, Harald Bosse, Rainer Tutsch
Abstract:A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors...
40
Authors: Zhuang De Jiang, Feng Xia Zhao, Wei Xuan Jing, Philip D. Prewett, Kyle Jiang
Abstract:Motif parameters were introduced to characterize line edge roughness (LER) of a nanoscale grating structure. Firstly with electron beam...
45
Authors: Evgeny V. Sysoev
Abstract:Chromatic aberrations in white-light interferometer can dramatically increase measurement nanorelief errors. It is shown that these errors...
51
Authors: Li Jiang Zeng, Lei Shi, Li Feng Li
Abstract:Contemporary chirped-pulse-amplified high-power laser systems rely on meter-sized diffraction gratings for pulse compression. Fabricating...
56
Authors: Ling Li Cheng, Jian Wei Yu, Xiao Fen Yu
Abstract:A 6-DOF monolithic nanopositioning stage is developed for three coordinate measuring machines (CMM) with nanometer resolution. The stage...
61
Authors: Ming Chang, Juti Rani Deka, Chia Hung Lin, Chin Chung Chung
Abstract:One-dimensional (1D) nanostructure such as nanowires (NWs), nanobelts and nanorods have attracted tremendous attention in recent years due to...
66
Authors: Albert Weckenmann, Philipp Krämer
Abstract:As a rather new technology, X-Ray Computed Tomography offers new and promising possibilities in manufacturing metrology in comparison to...
73
Authors: Markus Bartscher, Marko Neukamm, Uwe Hilpert, Ulrich Neuschaefer-Rube, Frank Härtig, Karin Kniel, Karsten Ehrig, Andreas Staude, Jürgen Goebbels
Abstract:Achieving traceability is crucial for complex measurement techniques, especially for coordinate measuring machines (CMMs). For CMMs using...
79
Authors: Walter Schott
Abstract:The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward...
84
Authors: Liang Chia Chen, Abraham Mario Tapilouw, Sheng Lih Yeh, Shyh Tsong Lin, Jin Liang Chen, Huan Chi Huang
Abstract:White light interferometry has become an important method for measuring micro surface profiles with a long vertical range and nano-scale...
89
Showing 11 to 20 of 129 Paper Titles