Paper Title:
Effect of Metal-Dielectric Interfaces on Tunability in Barium Strontium Titanate Thin-Film Capacitor
  Abstract

We investigated an influence of interface layer on a tunability of parallel plate (Ba, Sr)TiO3 thin film capacitors. BST thin film capacitors with top electrode of Pt, Au and Ag were fabricated. BST films had thickness of 40, 60, 80 and 120nm. The tunability increased with increasing the BST film thickness. Considering the interfaces between BST films and electrodes as Schottky junctions, depletion layers were formed in the interfaces depending on the difference of the work function of metal electrodes. Larger external bias voltages were applied to the depletion layer than interior BST film, because the permittivity in the depletion layer was smaller than that in interior BST film. Therefore, the depletion layer lowered the tunability. Tunability decreased with increasing the thickness of the depletion layers.

  Info
Periodical
Edited by
Shinobu Fujihara and Tadashi Takenaka
Pages
140-143
DOI
10.4028/www.scientific.net/KEM.445.140
Citation
N. Horiuchi, T. Hoshina, H. Takeda, O. Sakurai, T. Tsurumi, "Effect of Metal-Dielectric Interfaces on Tunability in Barium Strontium Titanate Thin-Film Capacitor", Key Engineering Materials, Vol. 445, pp. 140-143, 2010
Online since
July 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: S.Y. Wang, Bo Lin Cheng, Can Wang, Wei Peng, S.Y. Dai, Zhao Hui Chen
Abstract:In this work, BST (x=0.7, 0.5, 0.3) films have been deposited onto Nb-SrTiO3 substrate with pulsed laser deposition. The crystal structure...
81
Authors: Takashi Nishida, Takashi Nozaka, Takuya Tsuchikawa, Masahiro Echizen, Hiroaki Takeda, Kiyoshi Uchiyama, Tadashi Shiosaki
Abstract:(Ba,Sr)TiO3 (BST) thin films have been investigated because of significant interest in device applications of their nonlinear dielectric...
183
Authors: Kentaro Morito, Toshimasa Suzuki, Youichi Mizuno, Isao Sakaguchi, Naoki Ohashi, Kenji Matsumoto, Hajime Haneda
Abstract:The behavior of hydrogen in (Ba,Sr)TiO3 (BST) thin film capacitors under electric fields was investigated by performing secondary ion mass...
281
Authors: Xiao Hua Sun, Ping Feng, Jun Zou, Min Wu
Abstract:Barium strontium titanate Ba0.6Sr0.4TiO3 (BST) thin films were fabricated by pulsed laser deposition (PLD) technique on Pt/TiO2/SiO2/Si...
504
Authors: Andrea Testino
Abstract:A multi-components multi-layer co-fired ceramic varactor with superior performance is here presented. The concept combines a tunable...
16