Paper Title:
Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds
  Abstract

We present a process to fabricate Ni moulds on proton beam written (PBW) PMMA structures. These Ni mould are use to replicate PDMS lab on a chip devices featuring 300 nm details of high verticality, smooth sidewalls and high aspect ratios. The lifespan of the Ni mould can be extended and the functionality improved by means of introducing a 5 nm thick Teflon AF release layer. Following this method, PDMS chips have been fabricated for microfluidic experiments.

  Info
Periodical
Key Engineering Materials (Volumes 447-448)
Edited by
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
Pages
452-455
DOI
10.4028/www.scientific.net/KEM.447-448.452
Citation
P. G. Shao, J. A. van Kan, F. Watt, "Sub Micron Poly-Dimethyl Siloxane (PDMS) Replication Using Proton Beam Fabricated Nickel Moulds", Key Engineering Materials, Vols. 447-448, pp. 452-455, 2010
Online since
September 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Zhi Yu Zhao, Jian Cheng Fang, H. Wang, H.Y. Li
Abstract:In order to improve the lifespan and performance of the forming mould with low melting point, arc spray forming of stainless steel mould has...
603
Authors: Lidia Lityńska-Dobrzyńska, Patrick Ochin, Anna Góral, Marek Faryna, Jan Dutkiewicz
Abstract:The effect of rapid solidification on the microstructure of Al-Zn-Mg-Cu alloys with 8 wt.% Zn-2 wt.% Mg-2.3 wt.% Cu and 0.2 or 0.5 wt.% of Zr...
42
Authors: Kui Liu, Jian Hong Zhao, Kah Chuan Shaw, Hu Wu, Fern Lan Ng
Abstract:There are increasing demands for polymer based microfluidic devices as polymer devices can be mass produced using the injection molding...
456
Authors: Tie Nan Di, Li Jun Liu, Zhi Xin Jia, Ji Qiang Li, Hong Zhou, Xian Yi Li, Li Qiong Chen
Chapter 5: Advanced Machining and Materials Processing Technology
Abstract:For the short life of enterprise hot work die directly caused to problems in the waste of resources and the rising cost of production. Based...
893
Authors: Huan Xue, Rong Feng Li, Hong Chuan Zhu, Wen Jie Peng
Chapter 2: Materials Science and Engineering
Abstract:The importance of the coefficient of friction test in sheet metal forming field is introduced. Metallic sheet and strip testing method for...
529