Paper Title:
Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
  Abstract

This paper describes new electrostatic control countermeasures and solutions for critical electrostatic control environment for MEMS manufacturing processes, especially in MEMS’s wafer handling that needs low electrostatic voltage. This includes personnel grounding methodology, ESD event measurement, and low ion imbalance ionization to support current and future needs of the MEMS.

  Info
Periodical
Key Engineering Materials (Volumes 447-448)
Edited by
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
Pages
466-470
DOI
10.4028/www.scientific.net/KEM.447-448.466
Citation
A. Chakkaew, W. Titiroongruang, "Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process", Key Engineering Materials, Vols. 447-448, pp. 466-470, 2010
Online since
September 2010
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Price
$32.00
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