Paper Title:
Micro-Object Orientation Control by Using Different Vibration Modes of Board Stage
  Abstract

This paper deals with an orientation control method for micro objects, which have a size in the order of 100 micro meters, by using a board stage that is vibrated in the natural frequencies of various vibration modes. Orientation control is important for manufacturing processes, such as the assembling of small parts. Since it is difficult to grip and to manipulate micro objects, a simple and reliable method is desired. In this paper, the vibration mode is used for generating different motions of the stage and for controlling the orientation of the objects on the stage. Since each vibration mode has a unique vibration motion, different motions can be selected by choosing the vibration frequency. In order to design the stage so that the objects turn toward target direction, Finite Element Method (FEM) analysis was applied. And, the designed vibration stage was fabricated using a stainless steel thin plate. Experimental results showed that the actual vibration is similar with the simulation results. As an example of the orientation control of the micro objects, some small electronics parts were tested and they could be turned toward the target directions.

  Info
Periodical
Key Engineering Materials (Volumes 447-448)
Edited by
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
Pages
488-492
DOI
10.4028/www.scientific.net/KEM.447-448.488
Citation
T. Tateno, A. Kakuta, K. Okui, "Micro-Object Orientation Control by Using Different Vibration Modes of Board Stage", Key Engineering Materials, Vols. 447-448, pp. 488-492, 2010
Online since
September 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Peng Li, Han Chen, Xue Dong Chen
Micro/Nano Materials
Abstract:Micro-vibration of aerostatic bearings has been the bottleneck in the improvement of the moving and positioning accuracy of ultra-precision...
386
Authors: Mi Tao Song, Deng Qing Cao
Chapter 2: Dynamics of Mechanisms and Systems
Abstract:Combining the finite element method and the analytical method, a hybrid finite element-analytical approach is established to calculate the...
708
Authors: Jun Yong Tao, Bin Liu, Xiao Tao Li, Yu Nan Zhang
Chapter 7: Mechatronics
Abstract:The reliability of MEMS has been a key issue for its application. Micro-cantilever is a basic structure of MEMS, which has a notable...
1725
Authors: Tao Chen, Ming Qiang Pan, Yang Jun Wang, Ji Zhu Liu, Li Guo Chen, Li Ning Sun
Chapter 1: Mechatronics and Control
Abstract:Due to its simple structure, low consumption of energy but strong driving forces, Electrowetting on Dielectric (EWOD) is used most frequently...
14
Authors: Chao Liu, Chen Yang Xue, Dan Feng Cui, Jun Bin Zang, Yong Hua Wang, Jing Xue Wang
Chapter 7: Mechatronics, Measurements and Control
Abstract:We designed High-Q micro-ring resonators based on SOI material. A new method of using a top SiO2 layer to cover the waveguide is applied and...
443