The modeling and compensation of hysteresis in piezoelectrically driven systems are very important for positioning and noise and vibration reduction applications. An active vacuum clamping system for a stationary wood machining center with piezo actuators for the purpose of vibration control has been developed. This active system is intended to reduce workpiece vibrations, which are excited during machining. However, the piezo actuators have an inherent hysteresis effect between input voltage and output position of the vacuum plate. The Bouc-Wen and the Classical Preisach methods are studied in this paper to model the hysteresis curves and to compensate the hysteresis effect of the integrated piezo actuator.