Paper Title:
An Optical Fiber Probe for 3-D Micro Metrology
  Abstract

This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 µm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 µm diameter ruby sphere.

  Info
Periodical
Key Engineering Materials (Volumes 447-448)
Edited by
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
Pages
524-528
DOI
10.4028/www.scientific.net/KEM.447-448.524
Citation
H. Murakami, A. Katsuki, H. Onikura, T. Sajima, N. Kawagoishi, E. Kondo, T. Honda, "An Optical Fiber Probe for 3-D Micro Metrology", Key Engineering Materials, Vols. 447-448, pp. 524-528, 2010
Online since
September 2010
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Price
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