In order to fabricate micro textured polymer plate, some kinds of ions were irradiated to the substrate by using an Electron Cyclotron Resonance (ECR) ion shower apparatus. Surface morphology of specimens was observed by SEM, and measured by AFM. We observed a lot of micro polymer brushes on the substrate. The surface roughness of untreated specimen increased and reached to 248 nm by N2 ion irradiation. We have used Argon, Nitrogen and Oxygen ions. Oxygen ion shows more effective to etch than the other two ions. Also we measured the contact angle of water on the surface of specimens with optical microscope. The contact angle of untreated specimen decreased and reached to 8 degree by N and O ion irradiation. After the irradiation, we conducted sliding friction test between ion irradiated polycarbonate slider and flat polycarbonate specimen. It was observed that friction coefficient of ion irradiated polycarbonate slider showed lower friction than flat polycarbonate specimen under mixed lubrication condition in water.