Surface integrity is particularly important for the aerospace industry components in order to permit longer service life and maximized its reliability. This present work compares the performance of palm oil and synthetic ester on surface roughness, surface defect, microhardness and subsurface deformation when high speed drilling of Ti-6Al-4V under MQL condition. The drilling tests were conducted with AlTiN coated carbide tool. The surface roughness decreased with increasing in cutting speed and thicker subsurface deformation was formed underneath the machined surface. Grooves, cavities, pit holes, microcracks and material smearing were the dominant surface damages thus deteriorated the machined surface. For both lubricants, the machined surface experienced from thermal softening and work hardening effect thus gave a variation in microhardness values. The results indicated the substantial benefit of MQL by palm oil on surface integrity.