Paper Title:
Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers
  Abstract

In this paper, we report two kinds of guide patterns precisely created by electron beam drawing. These guide patterns are expected to precisely control the arrangement of nanodots self-assembled from block copolymer (BCP) in order to obtain long-range-order nanofabrication. The first guide pattern is comprised only of a post lattice. The second guide pattern adds guide lines to the post lattice. The added guide lines are expected to better control the location and orientation of the BCP nanodots. We succeeded in fabricating these two kinds of guide patterns for 22-nm- and 33-nm-pitch BCP nanodots.

  Info
Periodical
Edited by
Osamu Hanaizumi and Masafumi Unno
Pages
124-128
DOI
10.4028/www.scientific.net/KEM.459.124
Citation
T. Akahane, M. Huda, Y. Yin, S. Hosaka, "Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers", Key Engineering Materials, Vol. 459, pp. 124-128, 2011
Online since
December 2010
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