Paper Title:
Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe
  Abstract

We have prototyped illumination-collection mode scanning near-field optical microscopy (SNOM) and near-field Raman spectroscopy (NFRS) with gold inner-covered aperture-less pyramidal probe in order to study the possibility to detect optical images, and Raman spectrum and Raman peak shift for stress distribution in Si device with high resolution of about 10 nm.

  Info
Periodical
Edited by
Osamu Hanaizumi and Masafumi Unno
Pages
129-133
DOI
10.4028/www.scientific.net/KEM.459.129
Citation
S. Hosaka, H. Koyabu, Y. Aramomi, H. Sone, Y. Yin, E. Sato, K. Tochigi, "Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe", Key Engineering Materials, Vol. 459, pp. 129-133, 2011
Online since
December 2010
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