Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films |
|
| Journal | Key Engineering Materials (Volume 459) |
|---|---|
| Volume | Silicon Science and Advanced Micro-Device Engineering I |
| Edited by | Osamu Hanaizumi and Masafumi Unno |
| Pages | 173-176 |
| DOI | 10.4028/www.scientific.net/KEM.459.173 |
| Citation | Kenta Miura et al., 2010, Key Engineering Materials, 459, 173 |
| Online since | December, 2010 |
| Authors | Kenta Miura, Osamu Hanaizumi |
| Keywords | Photoluminescence (PL), Photonic Crystal, Silicon, Silicon Dioxide |
| Abstract | A light-emitting, two-dimensional photonic crystal composed of silicon-rich silicon-dioxide thin film was fabricated by using radio-frequency magnetron sputtering, simple interference exposure, and plasma etching. An enhanced photoluminescence spectrum was observed from the photonic crystal. We found that the photoluminescence peak was located around a wavelength of 830 nm and that the peak intensity was 1.5 times stronger than that from a silicon-rich silicon-dioxide thin film without a periodic structure. |
| Full Paper | 
Get the full paper by clicking here
|
First page example
