Paper Title:
On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing
  Abstract

Semiconductor manufacturing is challenged by strategy development for ensuring the yield of defect-free products. In this paper, an on-line performance assessment strategy is proposed to evaluate the EWMA-based run-to-run (RtR) controllers in a discrete microelectronics fabrication. Expressions of minimum variance performance (MVP) and best achievable performance (BAP) are derived in a rigorous way. Technologies such as close loop identification and numerical optimization are employed in order to carry out on-line monitoring. Case studies of the chemical mechanical polishing (CMP) unit operation show the efficacy and the attractiveness the strategy.

  Info
Periodical
Edited by
Long Chen, Yongkang Zhang, Aixing Feng, Zhenying Xu, Boquan Li and Han Shen
Pages
133-137
DOI
10.4028/www.scientific.net/KEM.464.133
Citation
L. Chen, "On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing", Key Engineering Materials, Vol. 464, pp. 133-137, 2011
Online since
January 2011
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xiao Yang Jia, Tian Xiang Xia, Mao Sheng Zhong, Jing Liang
Chapter 3: Environmental Safety and Health
Abstract:Application of probabilistic risk assessment (PRA) and deterministic risk assessment (DRA) at a coking plant site were compared. By DRA,...
798
Authors: Zhao Dong, Jing Shuo Niu, Ming He Feng, Xuan Ru Tao
Chapter 3: Mechatronics, Control and Automation, Measurement and Measuring Equipment
Abstract:Aiming at the problem of signal attenuation seriously, a block averaging pre-processing (BAP) differential coherent acquisition algorithm is...
663
Authors: Khairul Salleh Basaruddin, Naoki Takano
Chapter 3: Materials Engineering and Processing Technologies
Abstract:This study presents a prediction of apparent elastic moduli of vertebral trabecular bone using the homogenization method. A micro-finite...
167