Paper Title:
Optimization Design of MEMS Thermal Actuator for Food Industry
  Abstract

Micro-actuator is the key device for the MEMS to perform physical functions. According to a kind of bimorph thermal actuator, this article presents an optimum design method to improve the sensitivity of MEMS actuator. Based on thermal analysis of software ANSYS, the thermal displacement and distribution of temperature field can be obtained clearly. Then a series of reasonable parameters are determined by optimum calculation. The simulation comparison analyses including thermal displacement, stress distribution and fatigue life are carried out to demonstrate that the sensitivity of the optimized structure has been improved effectively by the presented optimization method.

  Info
Periodical
Key Engineering Materials (Volumes 467-469)
Edited by
Dehuai Zeng
Pages
373-376
DOI
10.4028/www.scientific.net/KEM.467-469.373
Citation
Y. J. Gong, F. Zhao, H. Y. Xiang, L. Zhang, "Optimization Design of MEMS Thermal Actuator for Food Industry", Key Engineering Materials, Vols. 467-469, pp. 373-376, 2011
Online since
February 2011
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Price
$32.00
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