Paper Title:
Analysis of Vacuum-Degree Limit of Plane Circular High-Vacuum Gas-Bearing
  Abstract

This paper studied a one-dimensional model of high-vacuum plane circular gas-bearing with a three-stage sealing system, and analyzed the performances of the high-vacuum gas-bearing by combining the finite element method and the flow rate principle of the vacuum technology. For an expected pressure in the vacuum chamber, the zero load-capacity accident could take place. The reasons for the zero load-capacity accident were given through analyzing the flow rate of each sealing stage while the relationship between the pressure in the vacuum chamber and the inlet pressure was obtained. Besides, the influences of many parameters on the vacuum degree limit of the vacuum chamber were examined carefully. The analysis in this paper showed that for a given multi-stage seal system, the vacuum degree limit of the vacuum-chamber was inherent at the nonzero load-capacity condition.

  Info
Periodical
Key Engineering Materials (Volumes 467-469)
Edited by
Dehuai Zeng
Pages
940-949
DOI
10.4028/www.scientific.net/KEM.467-469.940
Citation
L. J. Li, M. Zhang, Y. Zhu, J. C. Hu, "Analysis of Vacuum-Degree Limit of Plane Circular High-Vacuum Gas-Bearing", Key Engineering Materials, Vols. 467-469, pp. 940-949, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Guo Qing Wu, Wei Nan Zhu, Jing Ling Zhou
Abstract:There is a magnetic field inside of the radial bearing. The magnetic field distribution is one of the key factors that decides the running...
486
Authors: Guo Qi Liu, Jian Song, Bing Yan
Abstract:This paper presents a suitable solution of studying methods on BRBs’ critical load with finite element software.The effects of the relevant...
130
Authors: Xiao Biao Shan, Li Li Wang, Tao Xie, Wei Shan Chen
Chapter 3: Advanced Manufacturing Technology
Abstract:This paper firstly presented a mathematical model of the radial stiffness of a wire race ball bearing in a certain type of three-axis...
343
Authors: Jen Sheng Shie, Ming Chang Shih
Chapter 16: Advanced Design Technology
Abstract:This paper discusses about how to optimize design of an aerostatic bearing. In order to achieve the objective, there are four necessary...
3182
Authors: Xiao Bo Zuo, Jian Min Wang, Zi Qiang Yin, Sheng Yi Li
Chapter 3: Product and Devices Design, Modelling, Simulation, Analisys and Manufacture
Abstract:A self-compensated hydrostatic rotary bearing is designed and manufactured. The bearing is modeled by fluid flow network method, and...
674