Paper Title:
Dynamic and Control Modeling and Simulation of High Speed Precision Positioning XY Table
  Abstract

To study the dynamic performance and control strategy of a kind of high speed precision positioning XY table with a new kind of decoupling mechanism, the electromechanical co-simulation model with three closed-loop control system using proportional–integral–derivative controller (PID controller) is constructed. By use of finite element analysis (FEA) and co-simulation method, the preloaded spring as the key component in the decoupling mechanism is optimized. The matching law of the spring stiffness and preload is presented. The decoupling mechanism influence on the dynamic performance of the XY table during the movement is fully discussed. Based on the electromechanical model, a three closed-loop control scheme with disturbance observer and feed-forward controller is proposed. Co-simulation results demonstrate the validity of the control strategy.

  Info
Periodical
Key Engineering Materials (Volumes 467-469)
Edited by
Dehuai Zeng
Pages
978-983
DOI
10.4028/www.scientific.net/KEM.467-469.978
Citation
Z. P. Ma, X. Y. Zhao, F. J. Wang, D. W. Zhang, "Dynamic and Control Modeling and Simulation of High Speed Precision Positioning XY Table", Key Engineering Materials, Vols. 467-469, pp. 978-983, 2011
Online since
February 2011
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$32.00
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