Paper Title:
Research of Magnetic Stage Control System Based on DSP
  Abstract

Nanometer two-dimensional platform can realize the accurate positioning of X and Y coordinate, and it is the important parts of Nanometer Coordinate Measuring Machines (Nano-CMM),in order to realize the demand of large scale nanometer position , the magnetic stage is adopted, and magnetic stage control system is researched in this paper ,and designed the current loop, velocity loop and position loop controller, and the affection of variable control parameters are researched, and at last the magnetic stage system is realized.

  Info
Periodical
Key Engineering Materials (Volumes 474-476)
Edited by
Garry Zhu
Pages
2058-2063
DOI
10.4028/www.scientific.net/KEM.474-476.2058
Citation
Y. Zhang, S. L. Wei, H. Z. Sun, "Research of Magnetic Stage Control System Based on DSP", Key Engineering Materials, Vols. 474-476, pp. 2058-2063, 2011
Online since
April 2011
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Price
$32.00
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