Paper Title:
A Material Removal Modeling of Chemical Mechanical Polishing Based on Micro-Contact Mechanism
  Abstract

The model proposed integrates process parameters including pressure and velocity and other important input parameters including the wafer hardness, pad roughness, abrasive size, and abrasive geometry into the formulation to predict the material removal rate. Based on the deformation of hyper-elastic asperities attached to a linear-elastic pad, contact mechanism between the asperities and the wafer is analyzed. Micro-contact mechanism between the particle and wafer is proposed on the basis of elastic-plastic deformation theory. Material removal rate of single abrasive particle is calculated by the abrasive wear theory. The fluid effect in the current model is attributed to the number of active abrasives. Wafer scale material removal rate is analyzed in detail, which is agreed with the experimental results. The Preston’s coefficient, which has been determined empirically, is now given as a function of various processing variables, pad roughness, wafer material properties and slurry status.

  Info
Periodical
Key Engineering Materials (Volumes 474-476)
Edited by
Garry Zhu
Pages
472-477
DOI
10.4028/www.scientific.net/KEM.474-476.472
Citation
S. W. Du, Y. T. Li, J. J. Song, H. P. Qi, "A Material Removal Modeling of Chemical Mechanical Polishing Based on Micro-Contact Mechanism", Key Engineering Materials, Vols. 474-476, pp. 472-477, 2011
Online since
April 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Da Gang Xie, B. Gao, Ying Xue Yao, Zhe Jun Yuan
Abstract:Bonnet tool polishing is a novel aspherical polishing method. This paper describes a method to obtain the local removal rate for the...
335
Authors: Xue Feng Xu, H.F. Chen, H.T. Ma, B.X. Ma, Wei Peng
Abstract:In order to increase the material removal rate of silicon wafer, composite abrasives slurry was used in CMP. Zeta potential of polymer...
231
Authors: Ying Qiang Xu, Lei Lei Wang, Fu Hua Lin
Abstract:Mechanical property of coating under the micro-contact load such as impact and sliding wear significantly influence the reliability of...
976
Authors: Jeng Haur Horng, Yang Yuan Chen, Horng Wen Wu, Chin Chung Wei, Shin Yuh Chern
Abstract:Based on a three-body micro-contact mechanism and contact temperature theory, a micro-contact temperature model was developed to investigate...
1527
Authors: Guo Sheng Lan, Xue Liang Zhang, Hong Qin Ding, Shu Hua Wen, Zhong Yang Zhang
Chapter 1: Manufacturing Technology and Processing
Abstract:Through the analysis and research on three fractal models of normal contact stiffness of joint interfaces, the differences between them can...
336