Paper Title:
Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter
  Abstract

The rapid growth of micromaching technology makes the miniaturized or integrated MEMS resonator or filter become possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonators coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of 30 MHz of the micromechanical bandpass filter is demonstrated.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
112-116
DOI
10.4028/www.scientific.net/KEM.483.112
Citation
Y. M. Zhao, J. Ning, G. W. Han, C. W. Si, "Fabrication and Characterisation of Polysilicon-Based Clamped-Clamped Filter", Key Engineering Materials, Vol. 483, pp. 112-116, 2011
Online since
June 2011
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