Paper Title:
A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass
  Abstract

This work focuses on the development of a biaxial fully differential capacitive microaccelerometer with a single proof-mass. Its design, optimization and fabrication are discussed in detail. Structure and geometric parameters are optimized by multidisciplinary design optimization, enabling ±1g operating range, 1182Hz resonant frequency, 97 fF/g sensitivity, 4.1mg resolution and 0.68 damping ratio. Silicon-on-glass (SOG) bulk micromachining and inductively coupled plasma (ICP) etching technologies are adopted to fabricate this accelerometer.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
148-153
DOI
10.4028/www.scientific.net/KEM.483.148
Citation
Y. Liu, Z. Y. Wen, L. Chen, X. F. He, S. Q. Wang, "A Biaxial Capacitive Microaccelerometer with a Single Proof-Mass", Key Engineering Materials, Vol. 483, pp. 148-153, 2011
Online since
June 2011
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