Paper Title:
A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
  Abstract

A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality factor of driving and sensing modes are 2000 and 800, respectively. In the range of 0~2400 deg/sec, sensitivity and linearity of the fabricated gyroscope are 1 deg/sec and 0.3%, respectively.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
169-173
DOI
10.4028/www.scientific.net/KEM.483.169
Citation
H. L. Tang, X. X. Liu, H. Zhou, "A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames", Key Engineering Materials, Vol. 483, pp. 169-173, 2011
Online since
June 2011
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