Paper Title:
System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer
  Abstract

The paper describes the system design for a nonideal capacitive micromichined accelerometer in MATLAB/SIMULINK. In this paper, a fourth-order sigma-delta micromachined accelerometer system design is represented, which includes the electrode movement and circuit noise. By simulation and comparison with the ideal 4th-order sigma-delta accelerometer in MATLAB, we have found that the SNR is essentially influenced by the electrode movement. Moreover the influence of the electrode stiffness Ke is researched. We have also researched the effects of the kT/C noise and the front-end amplifier noise. This nonideal accelerometer system can represent more accurate simulation result.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
219-223
DOI
10.4028/www.scientific.net/KEM.483.219
Citation
X. W. Liu, Z. Li, G. N. Sun, Y. T. Liu, "System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer", Key Engineering Materials, Vol. 483, pp. 219-223, 2011
Online since
June 2011
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