Paper Title:
Design and Fabrication of Micro Oxygen Sensor
  Abstract

In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
237-242
DOI
10.4028/www.scientific.net/KEM.483.237
Citation
C. Y. Lee, L. K. Lin Liou, C. L. Chang, C. H. Tai, L. M. Fu, "Design and Fabrication of Micro Oxygen Sensor", Key Engineering Materials, Vol. 483, pp. 237-242, 2011
Online since
June 2011
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