Paper Title:
A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever
  Abstract

A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
374-377
DOI
10.4028/www.scientific.net/KEM.483.374
Citation
L. B. Zhao, E. Z. Huang, G. M. Zhang, Y. L. Zhao, X. P. Wang, Z. D. Jiang, Z. G. Liu, "A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever", Key Engineering Materials, Vol. 483, pp. 374-377, 2011
Online since
June 2011
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