Paper Title:
Multidisciplinary Design Optimization of the 2-D Microaccelerometer
  Abstract

Multidisciplinary design optimization of a 2-D microaccelerometer is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method, where the sensitivity, resolution, resonant frequency and damping ratio are selected as objective functions. Furthermore, the multi-objective optimum of the model is obtained by genetic algorithm.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
647-652
DOI
10.4028/www.scientific.net/KEM.483.647
Citation
Y. Liu, Z. Y. Wen, L. Chen, H. Y. Yang, "Multidisciplinary Design Optimization of the 2-D Microaccelerometer", Key Engineering Materials, Vol. 483, pp. 647-652, 2011
Online since
June 2011
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