Paper Title:
The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor
  Abstract

Polysilicon is a very attractive material in microelectronics for thermal sensors. In this paper, the effect of humidity on thermal resistance of surface micromachined polysilicon is invested. It is found that the thermal conductivity variation of air due to humidity changes the suspended polysilicon resistor evidently. This property could be used as the working principle of relative humidity sensor.

  Info
Periodical
Edited by
Xiaohao Wang
Pages
775-778
DOI
10.4028/www.scientific.net/KEM.483.775
Citation
H. Y. Ma, W. D. Zhang, E. J. Ding, "The Study of Humidity Effect on Self-Heated Surface Micromachined Polysilicon Resistor", Key Engineering Materials, Vol. 483, pp. 775-778, 2011
Online since
June 2011
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