Paper Title:
Effect of NH3 Atmosphere on Preparation of Al2O3-AlN Composite Film by Laser CVD
  Abstract

Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862–887 K), and AlN granular grains were embedded in between α-Al2O3 polyhedral grains.

  Info
Periodical
Edited by
Takashi Goto, Yi-Bing Cheng and Takashi Akatsu
Pages
172-176
DOI
10.4028/www.scientific.net/KEM.484.172
Citation
Y. You, A. Ito, R. Tu, T. Goto, "Effect of NH3 Atmosphere on Preparation of Al2O3-AlN Composite Film by Laser CVD", Key Engineering Materials, Vol. 484, pp. 172-176, 2011
Online since
July 2011
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