Paper Title:
Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD
  Abstract

c-axis-oriented YBa2Cu3O7- films were prepared by laser chemical vapor deposition (laser CVD) using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. YBa2Cu3O7- film almost in a single phase and that with different second phases of BaCuO2, CuBaO2, BaY2O4, CuYO2, Y2O3 and CuO were obtained by varying evaporation temperature of precursors. Ternary phase diagram as a function of evaporation amount of three precursors were obtained. The deposition rate of the c-axis-oriented YBCO film was 60 µmh-1, about 60–600 times higher than those of conventional CVD.

  Info
Periodical
Edited by
Takashi Goto, Yi-Bing Cheng and Takashi Akatsu
Pages
183-187
DOI
10.4028/www.scientific.net/KEM.484.183
Citation
P. Zhao, A. Ito, R. Tu, T. Goto, "Ternary Phase Relation on Preparation of YBa2Cu3O7-δ Films by Laser CVD", Key Engineering Materials, Vol. 484, pp. 183-187, 2011
Online since
July 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Kazuyuki Suzuki, De Sheng Fu, Kaori Nishizawa, Takeshi Miki, Kazumi Kato
77
Authors: Hyoun Woo Kim, Ju Hyun Myung
Abstract:Indium oxide (In2O3) films was deposited on TiN substrates by the metal organic chemical vapor deposition technique using a triethylindium...
760
Authors: Sin Liang Ou, Po Cheng Kuo, Shih Hsien Ma, Chih Long Shen, Don Yau Chiang, Wei Tai Tang
Abstract:The (GeSbSn)100-xFex films (x = 0 ~ 12.9) were deposited on nature oxidized silicon wafer, and glass substrate by dc magnetron sputtering....
731
Authors: Koichiro Inaba, Yujin Takemoto, Kouji Toyota, Kenichi Haga, Kouichi Tokudome, Masato Shinmiya, Naomi Kamiya, Minoru Oshima, Kenji Yoshino
Chapter 6: Functional Oxides and Other Materials
Abstract:A novel precursor for ZnO film deposition with Zn-O structure was synthesized by the reaction of diethylzinc and water in some ether...
277
Authors: Xue Hui Wang, Wu Tang, Ji Jun Yang
Chapter 6: Material Design of Computer Aided
Abstract:The porous Cu film was deposited on soft PVDF substrate by magnetron sputtering at different sputtering pressure. The microstructure and...
1451