BaTiO3 films were fabricated on Si substrate using inkjet printing technique. To achieve low-temperature fabrication of BaTiO3 films, Ba-Ti-alkoxide ink was prepared. The mixing ratio and sequence of raw materials were optimized for controlling the chemical stability and viscosity of alkoxide ink. The inkjet printing films on Si substrate were annealed at 700 °C, and it resulted in the formation of BaTiO3. It was found that the film quality was improved by adding BaTiO3 nanoparticles into the Ba-Ti-alkoxide ink.