Paper Title:
Planarization of Zinc Oxide Surface and Evaluation of Processing Damage
  Abstract

The processes for polishing a ZnO surface were investigated with the aim of establishing a process for obtaining an atomically flat surface with high crystalline quality. The defects in a layer undergoing mechanical polishing were monitored through photoluminescence measurements, and the purity of the polished surface was characterized by SIMS. An atomicallyfishing process.

  Info
Periodical
Edited by
Chazono Hirokazu, Fujihara Shinobu, Katayama Keiichi, Masumoto Hiroshi, Mizoguchi Teruyasu, Osada Minoru, Shinozaki Kazuo and Takeda Hiroaki
Pages
215-218
DOI
10.4028/www.scientific.net/KEM.485.215
Citation
H. Miyazaki, Y. Adachi, I. Sakaguchi, T. Ishigaki, N. Ohashi, "Planarization of Zinc Oxide Surface and Evaluation of Processing Damage", Key Engineering Materials, Vol. 485, pp. 215-218, 2011
Online since
July 2011
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