Crystalline anatase TiO2 thin films were obtained on glass substrates at 60°C, 75°C and 90°C, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO2 thin films. The H2 sensing properties of the TiO2 thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO2 thin films obtained at deposition temperature of 60°C exhibited the maximum H2 gas response at 350°C, and the magnitude of the sensor signal and the response time for 500ppm H2 was 1.25 and 17s, respectively.