For the purpose of bioinert coating on electronic devices, we developed the non-hydrolytic sol-gel derived organic-inorganic hybrid materials by addition of epoxy groups which can adhere strongly to the surface of electronic silicon device. The adhesion and chemical properties of hybrids were investigated as a function of epoxy group contents. The hybrids were prepared from 3-metacrloxypropyltrimethoxysilane (MPTS) and 3-glycidoxypropyltrimethoxysilane (GPTS) and diphenylsilanediol. The transparent hybrids were obtained after curing by UV irradiation. The adhesion properties of the hybrids were estimated by the maximum load to resist in a scratch test. The adhesion property of the hybrids increased with addition of GPTS and the highest adhesion was obtained from the hybrid with 5-10 mol% of GPTS. From the element analysis, Si concentrations of all the solutions were less than 2 mM after soaking for 7 d. The Si concentrations were not changed with increasing soaking period. The addition of epoxy groups is effective on improvement of adhesion property of the silica-based hybrid without loosening its chemical stability.