Paper Title:
Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications
  Abstract

InterDigitated Capacitive (IDC) sensor arrays are fabricated with conventional microelectronics-micromachining technologies on quartz substrates. After fabrication, a polymeric well is patterned around each IDC to precisely define the sensing area and thus deposit coatings of various polymers, by drop casting, in a reproducible and controlled manner. The gas sensing performance of the IDC array is presented for humidity and p-xylene.

  Info
Periodical
Edited by
E. Hristoforou and D.S. Vlachos
Pages
87-90
DOI
10.4028/www.scientific.net/KEM.495.87
Citation
P. Oikonomou, K. Manoli, D. Goustouridis, A. Botsialas, E. Valamontes, I. Raptis, M. Sanopoulou, "Polymer Coated Microfabricated Interdigitated Electrodes Arrays for Gas Sensing Applications", Key Engineering Materials, Vol. 495, pp. 87-90, 2012
Online since
November 2011
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