Paper Title:
Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment
  Abstract

We have studied functionalization of guide pattern with brush treatment. Especially, the effect of brush treatment on ordering of nanodots formed on the guide pattern was investigated. We used polydimethylsiloxane (PDMS) as brush modification to form self-assembled nanodots on the guide pattern using polystyrene (PS) - PDMS as block copolymer. The brush treatment using toluene solvent made guide patterns of the electron beam (EB) drawn resist behave like PDMS guide patterns and good ordering of the nanodots has been achieved. It was demonstrated that the brush treatment enabled the PDMS nanodots to be regularly located in the desired positions defined by the EB drawn guide patterns.

  Info
Periodical
Chapter
Chapter 3: Nano-Science and Technology
Edited by
Osamu Hanaizumi, Masafumi Unno and Kenta Miura
Pages
116-121
DOI
10.4028/www.scientific.net/KEM.497.116
Citation
T. Akahane, M. Huda, T. Tamura, Y. Yin, S. Hosaka, "Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment", Key Engineering Materials, Vol. 497, pp. 116-121, 2012
Online since
December 2011
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$32.00
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