Paper Title:
Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam
  Abstract

Proton beam writing (PBW) has attracted much attention recently as a next-generation micro-fabrication technology. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to sample surfaces. In addition, the refractive index of a poly (methyl methacrylate) (PMMA) can be increased by proton-beam irradiation. In this study, we fabricated the first 1.5-μm-band single-mode, straight-line waveguides and Y-junction waveguides consisting of PMMA layers using the PBW technique.

  Info
Periodical
Chapter
Chapter 4: Photonics Device and Technology
Edited by
Osamu Hanaizumi, Masafumi Unno and Kenta Miura
Pages
147-150
DOI
10.4028/www.scientific.net/KEM.497.147
Citation
K. Miura, Y. Machida, M. Uehara, H. Kiryu, Y. Ozawa, T. Sasaki, O. Hanaizumi, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, T. Kamiya, H. Nishikawa, "Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam", Key Engineering Materials, Vol. 497, pp. 147-150, 2012
Online since
December 2011
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Price
$32.00
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