Modeling and Identification of High Speed High Accuracy Lightweight Stages with Flexible Arms

Light-weight structures operating at high speeds may suffer from significant vibration problems, thus degrading positioning accuracy and exhibiting large settling time. High-performance vibration and motion controllers are usually designed based on precise dynamic model. This paper addresses the problem of modeling and identification of a high speed high accuracy lightweight positioning stage with flexible arm. A simplified state space model for vibration motion control purpose is given. A separated identification method is proposed. The parameters related to rigid body part and flexible body part are identified, separately. Rigid body dynamics is firstly identified by employing unbiased Least Squares technique. Subsequently, flexible body dynamics is identified by impact test and nonlinear LS technique. The experiment results show that applying proposed identification strategy can get more precise low frequency rigid body dynamic parameters without loss the identification precision of high frequency parameters.