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Micro-Nano Technology XIII

Key Engineering Materials Volume 503

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• p-5 Preface   [ 16 K ]
• p3 The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid   [ 475 K ]
  Authors: Meng Zhao, Ji Bin Zou, Jing Shang
• p8 A Monolithic Integrated Pressure Sensor   [ 254 K ]
  Authors: Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu
• p12 A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope   [ 260 K ]
  Authors: Qiang Li, Xiao Yun Tan, Guan Shi Wang
• p18 Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports   [ 176 K ]
  Authors: Wu Zhou, Bei Peng, Xiao Hong Hao
• p24 Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror   [ 270 K ]
  Authors: Chi Zhang, Yun Han Chen, Zheng You
• p29 Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane   [ 461 K ]
  Authors: Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li
• p35 New Isolation Optimization Method of RF MEMS Capacitive Switches   [ 237 K ]
  Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu
• p43 Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors   [ 235 K ]
  Authors: Chuan Guo Dou, Yan Hong Wu, Heng Yang, Xin Xin Li
• p49 MEMS Grating with Interdigitated-Comb Structure   [ 1 M ]
  Authors: Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang
• p55 Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor   [ 1 M ]
  Authors: Yu Xin Li, De Yong Chen, Jun Bo Wang
• p61 Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes   [ 1 M ]
  Authors: Guang Bei Li, De Yong Chen, Wen Tao He, Jun Bo Wang
• p67 Optimal Design of Micro Plastic Heat Radiator   [ 258 K ]
  Authors: Yue Han, Ya Jun Zhang, Da Ming Wu, Jian Zhuang, Kai Fang Dang
• p71 A Miniaturized Piezoelectric Wind Flutter Generator   [ 1 M ]
  Authors: Xing Qiang Zhao, Zhi Yu Wen, Zhi Gang Du
• p75 Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS   [ 586 K ]
  Authors: Wen Tao He, De Yong Chen, Guang Bei Li, Jun Bo Wang