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Micro-Nano Technology XIII

Volume 503

doi: 10.4028/www.scientific.net/KEM.503

Paper Titles published in this Main Theme:

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Paper Title	Page
Preface
The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid Authors: Meng Zhao, Ji Bin Zou, Jing Shang	3
A Monolithic Integrated Pressure Sensor Authors: Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu	8
A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope Authors: Qiang Li, Xiao Yun Tan, Guan Shi Wang	12
Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports Authors: Wu Zhou, Bei Peng, Xiao Hong Hao	18
Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror Authors: Chi Zhang, Yun Han Chen, Zheng You, Hu Huang	24
Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane Authors: Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li	29
New Isolation Optimization Method of RF MEMS Capacitive Switches Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu	35
Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors Authors: Chuan Guo Dou, Yan Hong Wu, Heng Yang, Xin Xin Li	43
MEMS Grating with Interdigitated-Comb Structure Authors: Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang	49

Showing 1 to 10 of 83 Paper Titles

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