Paper Title:
Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness

A novel silicon based dual-mass vibrating tuning fork vibratory gyroscope (TFG) with differential capacitor structure is designed in this paper. the U-shaped beam is adapted to connecting the two decoupling movement of the framework structure in order to achieve the independent of the movement of drive direction and sense direction. The TFG structure is also optimized to further reduce the mechanical coupling of the device. The drive combs are designed on the mass, while the sense combs are designed on the frame. All the combs in this gyroscope are dominated by slide-film air damping in order to lower the air damping. This gyroscope is designed to obtain robust operation against variations under atmospheric pressure condition. The TFG is tested at atmospheric pressure with a sensitivity of 17.8mV/◦/s and a linearity of 99.989%, capacitance structure sensitivity is 21.5αf/◦/s with an equivalent noise angular rate of 0.028◦/s/Hz1/2, respective.

Chapter 1: Micro/Nano Transducer/Acutar/Robot
Edited by
Xiaohao Wang
W.P. Chen, Y. B. Yang, Y. Yu, "Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness", Key Engineering Materials, Vol. 503, pp. 108-113, Feb. 2012
Online since
February 2012
US$ 28,-
Authors: Yi Lun Zhu, S.R. Wang, A.P. Qiu
Abstract:The principle of operation of double-ended resonant tuning forks (DETF) is described in this paper. A new kind of DETF used in the resonant...
Authors: Wei Ping Chen, Yu Gang Guo, Xiao Liang Chen, Hong Chen, Zhen Gang Zhao
Abstract:This paper researches on the temperature effects of a fully-symmetrical micromachined gyroscope. The Young’s modulus and thermal expansion...
Authors: Zheng Wang, Xiao Sheng Wu, Xiao Jun Hu, Wen Yuan Chen, Wei Ping Zhang
Abstract:Micromachined modal gyroscope based on elastic body (MMGEB) is a novel kind of rotating rate sensor, which has large stiffness and robust...
Authors: Ji Tao Shi, Shi Qiao Gao, Yue Lei Zheng
Chapter 2: Optical, Electronic Materials and Industrial Application
Abstract:The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper,...
Authors: Xi Hui Du, Feng Cui, Xiao Sheng Wu, Wu Liu, Wei Ping Zhang, Wen Yuan Chen
Chapter 2: Mechanic Manufacturing System
Abstract:Employing unique advantage of giant magnetostrictive strain of giant magnetostrictive material (GMM) for improving reference vibration...