Paper Title:

MEMS Bionic Vector Hydrophone

Periodical Key Engineering Materials (Volume 503)
Main Theme Micro-Nano Technology XIII
Chapter Chapter 1: Micro/Nano Transducer/Acutar/Robot
Edited by Xiaohao Wang
Pages 114-117
DOI 10.4028/
Citation Guo Jun Zhang et al., 2012, Key Engineering Materials, 503, 114
Online since February 2012
Authors Guo Jun Zhang, Chen Yang Xue, Ji Jun Xiong, Wen Dong Zhang, Xiao Yao Wang, Lin Xian Liu, Xiao Yang Ge
Keywords Bionic Structure, MEMS, Vector Hydrophone
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A novel MEMS vector hydrophone with bionics structure was introduced in 2007. As the acoustic-electric transducer infrastructure has been optimized, the performance of the hydrophone has been greatly improved compared with the previous. This hydrophone calibration was finished in National Defense Underwater Acoustics Calibration Laboratory of China. According to test results, the sensitivity of the hydrophone is -165dB(including pre-amplification 20 dB),The frequency response ranges from 20Hz to 2kHz (±5dB). And this hydrophone has a good directional pattern in form of "8"-shape.