Paper Title:

An Interface for Low-Q Micromachined Gyroscope

Periodical Key Engineering Materials (Volume 503)
Main Theme Micro-Nano Technology XIII
Chapter Chapter 1: Micro/Nano Transducer/Acutar/Robot
Edited by Xiaohao Wang
Pages 128-133
DOI 10.4028/
Citation Guan Shi Wang et al., 2012, Key Engineering Materials, 503, 128
Online since February 2012
Authors Guan Shi Wang, Mu Tao, Xiao Wei Liu
Keywords Frequency Modulation, Interface, PI Controller, PLL
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In this paper, an interface for low-Q micromachined gyroscope is designed. Based on the testified system architecture, the driving circuit with frequency modulation and PI controller, together with the sensing circuit contained twice demodulation, are designed. The bias stability of the gyroscope is 0.072 o/s, and the noise is 0.02o/s/Hz1/2.