An Interface for Low-Q Micromachined Gyroscope
| Periodical | Key Engineering Materials (Volume 503) |
|---|---|
| Main Theme | Micro-Nano Technology XIII |
| Edited by | Xiaohao Wang |
| Pages | 128-133 |
| DOI | 10.4028/www.scientific.net/KEM.503.128 |
| Citation | Guan Shi Wang et al., 2012, Key Engineering Materials, 503, 128 |
| Online since | February, 2012 |
| Authors | Guan Shi Wang, Mu Tao, Xiao Wei Liu |
| Keywords | Frequency Modulation, Interface, PI Controller, PLL |
| Price | US$ 28,- |
In this paper, an interface for low-Q micromachined gyroscope is designed. Based on the testified system architecture, the driving circuit with frequency modulation and PI controller, together with the sensing circuit contained twice demodulation, are designed. The bias stability of the gyroscope is 0.072 o/s, and the noise is 0.02o/s/Hz1/2.