Paper Title:

Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports

Periodical Key Engineering Materials (Volume 503)
Main Theme Micro-Nano Technology XIII
Edited by Xiaohao Wang
Pages 18-23
DOI 10.4028/www.scientific.net/KEM.503.18
Citation Wu Zhou et al., 2012, Key Engineering Materials, 503, 18
Online since February, 2012
Authors Wu Zhou, Bei Peng, Xiao Hong Hao
Keywords MEMS, Parallel-Plate Capacitor, Pull-In
Price US$ 28,-
Article Preview
View full size
Abstract

Parallel-plate capacitor whose plates both fixed to elastic supports is presented and analyzed in this paper, and its cantilevers model is analyzed to study the parameter dependence of pull-in voltage. The whole process of voltage calculation is based on material mechanics theories and analytical methods, and the results are verified by simulation of MEMS software, which is mainly aiming at the effects of plate dimensions on pull-in voltage. It is concluded that the longer are the supporting beams, the smaller are the effects of plate’s parameters on voltage, besides, the effect extent of longitudinal length of plate is little larger than that of transverse length.