Paper Title:

An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency

Periodical Key Engineering Materials (Volume 503)
Main Theme Micro-Nano Technology XIII
Chapter Chapter 3: Micro/Nano Fabrication & Measurement Technologies
Edited by Xiaohao Wang
Pages 308-311
DOI 10.4028/www.scientific.net/KEM.503.308
Citation Han Chen et al., 2012, Key Engineering Materials, 503, 308
Online since February 2012
Authors Han Chen, Hua Rong
Keywords Center-Anchored Circular Plate, Resonance Frequency, Young's Modulus
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Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young’s modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.