Paper Title:
An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
  Abstract

Large-scale measurement of material property is not suit for the MEMS thin-film. Research the in-situ measuring method for material property of the MEMS thin-film is urgently. A center-anchored circular plate is adopted as the test structure here. The resonance frequency of the circular plate is measured to extract the Young’s modulus of a MEMS thin-film. The accuracy of this non-contact in-situ measuring method has been verified by CoventorWare. The inferences of the stress gradient have been analyzed. The advantages of the test structure and the measuring method present here also have been discussed.

  Info
Periodical
Chapter
Chapter 3: Micro/Nano Fabrication & Measurement Technologies
Edited by
Xiaohao Wang
Pages
308-311
DOI
10.4028/www.scientific.net/KEM.503.308
Citation
H. Chen, H. Rong, "An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency", Key Engineering Materials, Vol 503, pp. 308-311, Feb. 2012
Online since
February 2012
Authors
Price
US$ 28,-
Share
Authors: Sang Woo Lee, Dae Young Shin, Kyoung Jin Chun
Abstract:The safety valve has been designed to protect high pressure vessels. A fracture plate made of a circular thin plate is located within the...
1581
Authors: Han Chen, Hua Rong, Ming Wang
Abstract:The stress gradient of a deposited thin-film is a mechanical parameter that affects the performance of MEMS devices, so in-situ measuring...
357
Authors: Chin Yu Wang
Chapter 3: Manufacturing Engineering
Abstract:The two gears of the double circular-arc helical gear is a mesh of a concave/convex combination. Because the curvature is close to each...
1595
Authors: Ming Hong Yuan, Shui Guang Tong, Qin Cai, Ning Tang
Chapter 1: Engineering Design. Theory and Practice
Abstract:Serious vibration and noise exists in the circular saw cutting process. In order to reduce the cutting vibration and noise, this paper uses...
364
Authors: Yan Qi Liu, Fu Lei Chu
Chapter 1: Vibration Engineering
Abstract:In this paper, the vibration characteristics of the rotating thin circular cylindrical shell subjected to the radial excitation are...
262