Paper Title:
Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes
| Periodical | Key Engineering Materials (Volume 503) |
|---|---|
| Main Theme | Micro-Nano Technology XIII |
| Edited by | Xiaohao Wang |
| Pages | 61-66 |
| DOI | 10.4028/www.scientific.net/KEM.503.61 |
| Citation | Guang Bei Li et al., 2012, Key Engineering Materials, 503, 61 |
| Online since | February, 2012 |
| Authors | Guang Bei Li, De Yong Chen, Wen Tao He, Jun Bo Wang |
| Keywords | Electrochemical Seismic Sensor, Interdidital Electrodes, Micro-Machined |
| Price | US$ 28,- |
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Abstract
An electrochemical seismic sensor (ECSS), which consists of interdigital electrodes immersed in electrolyte solution, based on MEMS technology is studied theoretically and experimentally in the paper. The output current of the sensor is employed to measure the ground motion. The device has a small size, simple design and fabrication process with low cost. Preliminary test results show that the novel electrochemical seismic sensor has satisfactory characteristics.
